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Maskmaking — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/photolithography/maskmaking

You are here: Home / Process / Process Modules / Photolithography / Maskmaking. Navigation · Process · Process Modules · Photolithography · Standard ...

Photomask Basics — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/photolithography/maskmaking/PhotomaskBasics-General.pdf/view

How to layout, design, and order a photomask from a commercial service, by Bill Martin.

About Photomasks at SNF — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/photolithography/maskmaking/about-photomasks-at-snf

You are here: Home / Process / Process Modules / Photolithography / Maskmaking / About Photomasks at SNF. Navigation · Process · Process Modules.

MRC Model 55 RIE, mrc — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/equipment/dry-etching/mrc-model-55-rie-mrc-contaminated/mrc-model-55-rie

The MRC is a general purpose, plasma reactive ion etching system, used to etch a variety of materials, including oxides, nitrides, silicons, and some organic ...

2% 950K PMMA — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/ebeam-resists/2-950k-pmma/view

You are here: Home / Process / Process Modules / Ebeam Resists / 2% 950K PMMA. Navigation · Process · Process Modules · Photolithography · Etching ...

Contact Mask Design Principles — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/photolithography/maskmaking/ContactMaskTutorial.pdf/view

By Alissa Fitzgerald. SNF no longer supports some of the aligner tools mentioned , but this is an excellent overview of the process considerations needed to ...

Flexus 2320 — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/equipment/characterization-testing/flexus-2320

You are here: Home / Equipment / Characterization & Testing Summary / Flexus 2320. Navigation · Equipment · Equipment Summary · Beam Tools · Optical ...

List of Available Photoresists — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/photolithography/standard-resists-at-snf

You are here: Home / Process / Process Modules / Photolithography / Standard Resists at SNF. Navigation · Process · Process Modules · Photolithography.

Ebeam Resists — Stanford Nanofabrication Facility

snf.stanford.edu/SNF/processes/process-modules/ebeam-resists

You are here: Home / Process / Process Modules / Ebeam Resists. Navigation · Process · Process Modules · Photolithography · Etching · Oxidation Furnaces- ...

Applied Materials Precision 5000 Etcher, p5000etch — Stanford ...

snf.stanford.edu/SNF/equipment/dry-etching/applied-materials-precision-5000-etcher-p500etch-semi-clean/applied-materials-precision-5000-etcher

The Applied Materials Precision 5000 Etcher is a "cluster" tool, consisting of four, independently-controlled etch chamber modules which surround a central ...

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Service Providers — Stanford Nanofabrication Facility

snf.stanford.edu

Links to maskmaking services used by SNF labmembers.

Photolithography — Stanford Nanofabrication Facility

snf.stanford.edu

This folder contains process modules related to photolithography such as Lift Off procedures, SU8 procedures, how to work with Polyimide, information about ...

Dry Etching — Stanford Nanofabrication Facility

snf.stanford.edu

This folder contains process modules about dry (or plasma) etching of various materials such as oxide, polysilicon, Al, photoresist (including descum) etc.